Fabrication processes

This section documents the fabrication and characterization processes used in the SMF.

Initial processes

• Wafer cleaning
• Photolithography
• Thermal oxidation
• Doping
• Wet and dry etching
• Metallization
• Annealing
• Electrical characterization

Each process page should describe:

• purpose;
• required equipment;
• required materials;
• important parameters;
• process steps;
• expected results;
• common problems;
• related safety documents.

Only approved procedures should be marked as established SMF processes.