Student Microelectronics Foundry¶

The Student Microelectronics Foundry (SMF) is a student-organized platform for practical microelectronics, semiconductor fabrication and microsystems engineering.

The documentation collects:

organizational information;
safety documentation;
fabrication processes;
equipment instructions;
experiments and student projects.

Main areas¶

Semiconductor device fabrication
Photolithography and microstructuring
Doping, oxidation, etching and metallization
Electrical characterization
Open-source laboratory equipment
Teaching and student projects

Documentation is not authorization

Laboratory work may only be performed after the required safety training, equipment instruction and approval.